Alignment stage delivers +/- 3 micron accuracy
Stephen LawAutomation / Robotics Electronics Semiconductors industrial medical semiconductor
OPTIMAL ENGINEERING SYSTEMS XYR-300-400 Alignment Stage offering +/- 3 micron accuracy for industrial, medical, semiconductor, production, research, and laboratory applications. Unit features +/- 15 mm of travel in the X and Y axes and +/- 5 degrees of rotation (theta). It moves in XY-plane and rotates around the center of the XY-plane. Product features linear resolutions of the X and Y axis of 1 micron resolution with a 10 micro-steps per step motor driver and static parallelism of less than 0.05 mm. Two-phase stepper motors are standard; however, servo motors with quadrature optical encoders are also available as an option for greater resolution and repeatability. Product’s 8mm diameter and 2mm per-turn precision ball screws and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of this compact alignment stage. Table of the stage is 300 x 300mm and has threaded holes and a 110 x 110mm opening for optics, cables, etc.; a solid top is available. The base plate is 400 x 400mm and the height of the alignment stage is just 98 mm.